Influence of the electrode materials on the homogeneity of the discharge in fluorine based excimer laser gas mixtrues

  • D. Mathew (Speaker)
  • Hubertus M.J. Bastiaens (Speaker)
  • Boller, K. J. (Speaker)
  • P.J.M. Peters (Speaker)

Activity: Talk or presentation › Oral presentation

Description

Plaats van uitgifte: Gmunden, Oostenrijk
Period4 Sept 2006
Event titleXVI International Symposium on Gas Flow and Chemical Lasers & High Power Lasers Conference, GCL/HPL 2006
Event typeConference
LocationGmunden, OostenrijkShow on map

Keywords

  • METIS-232917