Influence of the electrode materials on the homogeneity of the discharge in fluorine based excimer laser gas mixtrues

D. Mathew (Speaker), Bastiaens, H. M. J. (Speaker), Boller, K. J. (Speaker), P.J.M. Peters (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Gmunden, Oostenrijk
Period4 Sep 2006

Keywords

  • METIS-232917