Influence of the electrode materials on the homogeneity of the discharge in fluorine based excimer laser gas mixtrues

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Gmunden, Oostenrijk
Period4 Sep 2006
Event titleXVI International Symposium on Gas Flow and Chemical Lasers & High Power Lasers Conference, GCL/HPL 2006
Event typeConference
LocationGmunden, OostenrijkShow on map

Keywords

  • METIS-232917