Influence of the electrode materials on the homogeneity of the discharge in fluorine based excimer laser gas mixtrues

D. Mathew (Speaker), Bastiaens, H. M. J. (Speaker), Boller, K. J. (Speaker), P.J.M. Peters (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Gmunden, Oostenrijk
Period4 Sep 2006
Event titleXVI International Symposium on Gas Flow and Chemical Lasers & High Power Lasers Conference, GCL/HPL 2006: null
Event typeConference
LocationGmunden, Oostenrijk

Keywords

  • METIS-232917