Initial growth of polycrystalline Si and GeSi alloys in an RTP system

J.B. Rem (Keynote speaker), Salm, C. (Keynote speaker), Weusthof, M. H. H. (Keynote speaker), J. Holleman (Keynote speaker), J.F. Verweij (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Description

    Symposium Rapid Thermal and Integrated Processing IV
    Period17 Apr 1995
    Event titleMRS Spring Meeting 1995
    Event typeConference
    LocationSan Francisco, United States, California
    Degree of RecognitionInternational

    Keywords

    • METIS-116247