Introduction: history, aim and organization of the workshop

Michael Curt Elwenspoek (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Key-note speaker Plaats van uitgifte: Holten
    Period17 May 1998
    Event titleWorkshop on Physical chemistry of wet chemical etching of silicon 1998
    Event typeConference
    LocationHolten, Netherlands

    Keywords

    • METIS-116416