Introduction to MEMS scaling and fabrication: microactuators and microsensors technology

Michael Curt Elwenspoek (Invited speaker)

    Activity: Talk or presentation › Oral presentation

    Description

    Opmerking: Invited Plaats van uitgifte: Udine
    Period20 Jun 2000
    Held atInternational Centre for Mechanical Sciences, Italy

    Keywords

    • METIS-116376