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Introduction to MEMS scaling and fabrication: microactuators and microsensors technology
Michael Curt Elwenspoek (Invited speaker)
Activity
:
Talk or presentation
›
Oral presentation
Description
Opmerking: Invited Plaats van uitgifte: Udine
Period
20 Jun 2000
Held at
International Centre for Mechanical Sciences
, Italy
Keywords
METIS-116376