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Introduction to MEMS scaling and fabrication: microactuators and microsensors technology

  • Michael Curt Elwenspoek (Invited speaker)

    Activity: Talk or presentation › Oral presentation

    Description

    Opmerking: Invited Plaats van uitgifte: Udine
    Period20 Jun 2000
    Held atInternational Centre for Mechanical Sciences, Italy

    Keywords

    • METIS-116376