Ion-implantation-caused special damage profiles determined by spectroscopic ellipsometry in crystalline and in relaxed (annealed) amorphous silicon

T. Lohner (Speaker), M. Fried (Speaker), J. Gyulai (Speaker), K. Vedam (Speaker), N.V. Nguyen (Speaker), L.J. Hanekamp (Speaker), Arend van Silfhout (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Parijs, Frankrijk
Period11 Jan 1993
Event title1st International Conference on Spectroscopic Ellipsometry, ICSE 1993
Event typeConference
Conference number1
LocationParis, France

Keywords

  • METIS-133035