Ion the stability of the oxide-air interface in silicon microphones

Piet Bergveld (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: St. Louis, France
    Period18 Feb 1993
    Event titleWorkshop on Micromechnical Accoustic Sensor
    Event typeConference
    LocationSt. Louis, France

    Keywords

    • METIS-118092