IR refocusing: collector mirror design

Bayraktar, M. (Speaker), van Goor, F. A. (Speaker), Louis, E. (Speaker), Boller, K. J. (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Toyama, Japan
Period7 Oct 2013
Held at2013 International Symposium on Extreme Ultraviolet Lithography
Event typeConference
LocationToyama, Japan

Keywords

  • METIS-299658