Lamellar multilayer amplitude gratings for the XUV wavelength region: design and fabrication by UV-NIL

R. van der Meer (Speaker), I.V. Kozhevnikov (Speaker), B. Vratzov (Speaker), Bastiaens, H. M. J. (Speaker), Boller, K. J. (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Period12 Feb 2010
Event titleEOS Topical Meeting on Diffractive Optics, DO 2010
Event typeConference
LocationKoli, Finland
Degree of RecognitionInternational

Keywords

  • METIS-265549