Lamellar multilayer amplitude gratings for the XUV wavelength region: design and fabrication by UV-NIL

Activity: Talk or presentationOral presentation

Period12 Feb 2010
Event titleEOS Topical Meeting on Diffractive Optics, DO 2010
Event typeConference
OrganiserEuropean Optical Society (EOS)
LocationKoli, Finland
Degree of RecognitionInternational

Keywords

  • METIS-265549