Lamellar multilayer amplitude gratings for the XUV wavelength region: design and fabrication by UV-NIL

  • R. van der Meer (Speaker)
  • I.V. Kozhevnikov (Speaker)
  • B. Vratzov (Speaker)
  • Hubertus M.J. Bastiaens (Speaker)
  • Boller, K. J. (Speaker)
  • Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Period12 Feb 2010
Event titleEOS Topical Meeting on Diffractive Optics, DO 2010
Event typeConference
OrganiserEuropean Optical Society (EOS)
LocationKoli, FinlandShow on map
Degree of RecognitionInternational

Keywords

  • METIS-265549