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Large area deposition of PZT on Si Wafers
Jan M. Dekkers (Speaker)
Ruud Johannes Antonius Steenwelle (Speaker)
David H.A. Blank (Speaker)
Rijnders, A. J. H. M.
(Speaker)
J.A. Janssens (Speaker)
Inorganic Materials Science
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Trondheim, Norway
Period
14 Jun 2010
Event title
Electroceramics XII 2010
Event type
Conference
Location
Trondheim, Norway
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Keywords
METIS-269587