Large area deposition of PZT on Si Wafers

Jan M. Dekkers (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), David H.A. Blank (Speaker), Rijnders, A. J. H. M. (Speaker), J.A. Janssens (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Trondheim, Norway
Period14 Jun 2010
Event titleElectroceramics XII 2010: null
Event typeConference
LocationTrondheim, Norway

Keywords

  • METIS-269587