Large area deposition of PZT on Si Wafers

Jan M. Dekkers (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), David H.A. Blank (Speaker), Rijnders, A. J. H. M. (Speaker), J.A. Janssens (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Trondheim, Norway
Period14 Jun 2010

Keywords

  • METIS-269587