Laser-induced heating and surface modification in ruthenium thin films

  • Fedor Akhmetov (Speaker)

Activity: Talk or presentationOral presentation

Period25 Apr 2023
Event titleSPIE Optics + Optoelectronics 2023: Optics Damage and Materials Processing by EUV/X-ray Radiation
Event typeConference
LocationPrague, Czech RepublicShow on map