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Laterally resolved work function measurements during the initial oxidation of sillicon
Sturm, J. M.
(Speaker)
G.O. Croes (Speaker)
Wormeester, H.
(Speaker)
Poelsema, B.
(Speaker)
Physics of Interfaces and Nanomaterials
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Nice, France
Period
29 May 2006
Event title
E-MRS Spring Meeting 2006: Electrical properties of ultr-thin aluminum oxide layers on silicon
Event type
Conference
Location
Nice, France
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Keywords
METIS-235980
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