Laterally resolved work function measurements during the initial oxidation of sillicon

Sturm, J. M. (Speaker), G.O. Croes (Speaker), Wormeester, H. (Speaker), Poelsema, B. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Nice, France
Period29 May 2006
Event titleE-MRS Spring Meeting 2006: Electrical properties of ultr-thin aluminum oxide layers on silicon
Event typeConference
LocationNice, France

Keywords

  • METIS-235980