Loading effects on silane reduced selective Tungsten growth demonstrated with in situ rate measurements

J. Holleman (Speaker), A. Hasper (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Tokyo
    Period28 Oct 1991
    Event titleJapan Conference Advanced metallization for VLSI applications: null
    Event typeConference
    LocationTokyo

    Keywords

    • METIS-117169