Micro structural evaluation of polysilicon films formed by Rapid Thermal CVD

I. Barsony (Speaker), J.G.E. Klappe (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Balatonaliga, Hungary
    Period5 Oct 1992
    Event title5th IUVSTA Workshop 1992: Polycrystalline Films: Structural Evolution and Structure/Property Relationships
    Event typeWorkshop
    Conference number5
    LocationBalatonaliga, Hungary

    Keywords

    • METIS-117163