Micromechanical resonator sensors

Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Blankenberghe, Belgie
    Period20 Mar 1991
    Event title10th Benelux Meeting on Systems and Control 1991
    Event typeConference
    Conference number10
    LocationBlankenberghe, Belgium

    Keywords

    • METIS-117915