Modelling and quantification of the MOCVD-process

V.A.C. Haanappel (Speaker), H.D. van Corbach (Speaker), T. Fransen (Speaker), P.J. Gellings (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: University of Chicago of Illinois, USA
Period12 May 1993

Keywords

  • METIS-110456