Modelling of Crystal Originated Particles and their Impact on Gate Oxyde Integrity

T. Bearda (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Philadelphia
    Period15 May 2002
    Event titleNinth International Symposium On Silicon Materials Science and Technology
    Event typeConference
    LocationPhiladelphia

    Keywords

    • METIS-206171