Monte Carlo simulation of wet chemical etching of silicon

E. van Veenendaal (Keynote speaker), J. van Suchtelen (Keynote speaker), P. van Beurden (Keynote speaker), H. Cuppen (Keynote speaker), W.J.P. van Enckevort (Keynote speaker), A.J. Nijdam (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), E. Vlieg (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Key-note speaker Plaats van uitgifte: Toulouse, France
    Period15 May 2000
    Event titleVoordracht, Second workshop on physical chemistry of wet etching in silicon
    Event typeConference
    LocationToulouse, France

    Keywords

    • METIS-116378