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Multilayer coatings for the lithography generation beyond EUVL
Makhotkin, I. A.
(Speaker)
E. Zoethout (Speaker)
Louis, E.
(Speaker)
A.M. Yakunin (Speaker)
V. Banine (Speaker)
S. Muellender (Speaker)
Bijkerk, F.
(Speaker)
Laser Physics & Nonlinear Optics
XUV Optics
Activity
:
Talk or presentation
›
Oral presentation
Description
Titelbijdrage: Tertiary Multilayer coatings for the lithography generation beyond EUVL Plaats van uitgifte: Ede
Period
30 Sep 2012
Event title
2012 International Symposium on Extreme Ultraviolet Lithography
Event type
Conference
Location
Brussels, Belgium
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Keywords
METIS-298880