Multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A. (Speaker), E. Zoethout (Speaker), Louis, E. (Speaker), A.M. Yakunin (Speaker), V. Banine (Speaker), S. Muellender (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Description

Titelbijdrage: Tertiary Multilayer coatings for the lithography generation beyond EUVL Plaats van uitgifte: Ede
Period30 Sep 2012
Held at2012 International Symposium on Extreme Ultraviolet Lithography
Event typeConference
LocationBrussels, Belgium

Keywords

  • METIS-298880