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Multilayer coatings for the lithography generation beyond EUVL
Makhotkin, I. A.
(Speaker), Eric Louis (Speaker), E. Zoethout (Speaker),
Bijkerk, F.
(Speaker)
Laser Physics & Nonlinear Optics
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Ede, Netherlands
Period
10 Dec 2012
Event title
Netherlands MicroNanoConference 2012
Event type
Conference
Location
Ede/Wageningen, Netherlands
Keywords
METIS-294431