Multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A. (Speaker), Louis, E. (Speaker), E. Zoethout (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Ede, Netherlands
Period10 Dec 2012
Event titleNetherlands MicroNanoConference 2012
Event typeConference
LocationEde/Wageningen, Netherlands

Keywords

  • METIS-294431