Multilayer coatings for the lithography generation beyond EUVL

  • Igor Alexandrovich Makhotkin (Speaker)
  • E. Zoethout (Speaker)
  • Louis, E. (Speaker)
  • A.M. Yakunin (Speaker)
  • V. Banine (Speaker)
  • S. Muellender (Speaker)
  • Bijkerk, F. (Speaker)

Activity: Talk or presentation › Oral presentation

Description

Titelbijdrage: Tertiary Multilayer coatings for the lithography generation beyond EUVL Plaats van uitgifte: Brussels
Period30 Sept 2012
Event title2012 International Symposium on Extreme Ultraviolet Lithography
Event typeConference
LocationBrussels, BelgiumShow on map

Keywords

  • METIS-298886