Nanometer lithography on silicon and hydrogenated amorphous silicon with ion energy electrons

N. Kramer (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Veldhoven
Period16 Nov 1994
Event titleFOM Werkgemeenschap Halfgeleiders 1994
Event typeConference
LocationVeldhoven, Netherlands

Keywords

  • METIS-132988