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Nanometer lithography on silicon and hydrogenated amorphous silicon with ion energy electrons
N. Kramer (Speaker)
Physics of Interfaces and Nanomaterials
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Veldhoven
Period
16 Nov 1994
Event title
FOM Werkgemeenschap Halfgeleiders 1994
Event type
Conference
Location
Veldhoven, Netherlands
Keywords
METIS-132988