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Nanometer lithography on silicon and hydrogenated amorphous silicon with ion energy electrons

  • N. Kramer (Speaker)

Activity: Talk or presentation › Oral presentation

Description

Plaats van uitgifte: Veldhoven
Period16 Nov 1994
Event titleFOM Werkgemeenschap Halfgeleiders 1994
Event typeConference
LocationVeldhoven, NetherlandsShow on map

Keywords

  • METIS-132988