Looking forward to future development of the equipment intended for characterization and chemical actuation (by heat or light) of microscopic and further nanoscopic quantities of matter, there is a great demand for low-power, simple and cheap devices. A variety of such sensing/actuating devices can be embedded into a multifunctional lab-on-a-chip system and there actuate and in-situ characterize physical and chemical processes on micro- and nanometer scale. A CMOS-compatible technology is desired to enable the low-cost production in large quantities and in large arrays in standard IC factories with a minimum of dedicated post processing and a short development period.