Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring

J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Bastiaens, H. M. J. (Speaker), van de Kruijs, R. W. E. (Speaker), Bijkerk, F. (Speaker), Boller, K. J. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Lunteren
Period13 Oct 2015
Held at39th Annual Meeting NNV AMO Lunteren 2015
Event typeConference
Conference number39
LocationLunteren, Netherlands

Keywords

  • METIS-312159