New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining

Berenschot, J. W. (Speaker), Gardeniers, J. G. E. (Speaker), Lammerink, T. S. J. (Speaker), Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Period26 Sep 1993
    Event titleEurosensors VII
    Event typeConference
    LocationBudapest, Hungary