On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources.

Kovalgin, A. Y. (Speaker), J. Holleman (Speaker)

    Activity: Talk or presentationOral presentation


    Plaats van uitgifte: Salt Lake City, USA
    Period20 Oct 2002
    Event title202nd Meeting of the Electrochemical Society: null
    Event typeConference
    LocationSalt Lake City, USA


    • METIS-207810