Skip to main navigation
Skip to search
Skip to main content
Home
Profiles
Research Units
Research Output
Datasets
Activities
Prizes
Press / Media
Search by expertise, name or affiliation
On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources.
Kovalgin, A. Y.
(Speaker), J. Holleman (Speaker)
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Salt Lake City, USA
Period
20 Oct 2002
Keywords
METIS-207810