On the extension of the pulse length of a discharge excited ArF excimer laser

L. Feenstra (Keynote speaker), Bastiaens, H. M. J. (Keynote speaker), P.J.M. Peters (Keynote speaker), W.J. Witteman (Keynote speaker)

Activity: Talk or presentationOral presentation

Description

Opmerking: Key-note speaker Plaats van uitgifte: Budapest, Hungary
Period2 Jul 1999
Event title8th International Laser Physics Workshop, LPHYS 1999: null
Event typeConference
Conference number8
LocationBudapest, Hungary

Keywords

  • METIS-132045