Optical Excitation of Micro-Mechanical Resonators

Lammerink, T. S. J. (Speaker), Elwenspoek, M. (Speaker), J.H.J. Fluitman (Speaker)

    Activity: Talk or presentationOral presentation

    Period30 Jan 1991
    Held atIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991
    Event typeConference
    LocationNara, Japan
    Degree of RecognitionInternational