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Optical Excitation of Micro-Mechanical Resonators

  • T.S.J. Lammerink (Speaker)
  • M. Elwenspoek (Speaker)
  • J.H.J. Fluitman (Speaker)

    Activity: Talk or presentation › Oral presentation

    Period30 Jan 1991
    Event titleIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991
    Event typeConference
    LocationNara, JapanShow on map
    Degree of RecognitionInternational