Optimization of capacitive microphone and pressure sensor performance by capacitor-electrode shaping

J.A. Voorthuyzen (Speaker), A.J. Sprenkels (Speaker), A.G.H. van der Donk (Speaker), P.R. Scheeper (Speaker), Piet Bergveld (Speaker)

    Activity: Talk or presentationOral presentation

    Period2 Oct 1990
    Event title4th European Conference on Solid-State Transducers, Eurosensors 1990
    Event typeConference
    Conference number4
    LocationKarlsruhe, Germany