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Optimization of capacitive microphone and pressure sensor performance by capacitor-electrode shaping

  • J.A. Voorthuyzen (Speaker)
  • A.J. Sprenkels (Speaker)
  • A.G.H. van der Donk (Speaker)
  • P.R. Scheeper (Speaker)
  • Piet Bergveld (Speaker)

    Activity: Talk or presentation › Oral presentation

    Period2 Oct 1990
    Event title4th European Conference on Solid-State Transducers, Eurosensors 1990
    Event typeConference
    Conference number4
    LocationKarlsruhe, GermanyShow on map