Optimization of Si and GexSi1-x crystallization with furnace and Rapid Thermal anneals for thin film transistors

J.B. Rem (Keynote speaker), M.C.V. de Leuw (Keynote speaker), J. Holleman (Keynote speaker), J.F. Verweij (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Key-note speaker Plaats van uitgifte: San Antonio, Texas, U.S.A.
    Period11 Oct 1996
    Event title190th Electrochemical Society Meeting Conference
    Event typeConference
    LocationSan Antonio, Texas, U.S.A.

    Keywords

    • METIS-116250