Orientation switch of PZT thin films on silicon substrates by a single process step

Jan M. Dekkers (Speaker), Nguyen, D. M. (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), David H.A. Blank (Speaker), Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Xian, China
Period23 Aug 2009
Event titleIMS-ISAF 2009: null
Event typeConference
LocationXian, China

Keywords

  • METIS-262479