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Package stress reduction and low initial stress thanks to deep corrugations
V.L. Spiering (Speaker),
Burger, J. F.
(Speaker), Michael Curt Elwenspoek (Speaker), S. Bouwstra (Speaker)
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Yokohama, Japan
Period
7 Jun 1993
Event title
Voordracht, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
Event type
Conference
Location
Yokohama, Japan
Keywords
METIS-118202