Package stress reduction and low initial stress thanks to deep corrugations

V.L. Spiering (Speaker), Burger, J. F. (Speaker), Michael Curt Elwenspoek (Speaker), S. Bouwstra (Speaker)

    Activity: Talk or presentation › Oral presentation

    Description

    Plaats van uitgifte: Yokohama, Japan
    Period7 Jun 1993
    Event titleVoordracht, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
    Event typeConference
    LocationYokohama, Japan

    Keywords

    • METIS-118202