PECVD Silicon Nitride Diaphragms for Condenser Microphones

P.R. Scheeper (Speaker), J.A. Voorthuyzen (Speaker), Piet Bergveld (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Karlsruhe
    Period1 Oct 1990
    Event title4th European Conference on Solid-State Transducers, Eurosensors 1990
    Event typeConference
    Conference number4
    LocationKarlsruhe, Germany

    Keywords

    • METIS-118175