PECVD Silicon Oxynitride optimized for application in integrated optics

K. Worhoff (Keynote speaker), A. Driessen (Keynote speaker), P. Lambeck (Keynote speaker), L.T.H. Hilderink (Keynote speaker), Th.J.A. Popma (Keynote speaker), Linders, P. W. C. (Keynote speaker)

Activity: Talk or presentationOral presentation

Period16 Jun 1998
Event titleE-MRS Spring Meeting 1998
Event typeConference
LocationStrasbourg, France
Degree of RecognitionInternational