PECVD Silicon Oxynitride optimized for application in integrated optics

  • K. Worhoff (Keynote speaker)
  • A. Driessen (Keynote speaker)
  • P. Lambeck (Keynote speaker)
  • L.T.H. Hilderink (Keynote speaker)
  • Th.J.A. Popma (Keynote speaker)
  • Linders, P. W. C. (Keynote speaker)

Activity: Talk or presentationOral presentation

Period16 Jun 1998
Event titleE-MRS Spring Meeting 1998
Event typeConference
OrganiserEuropean Materials Research Society
LocationStrasbourg, FranceShow on map
Degree of RecognitionInternational