Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Nematollahi, M. (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period7 Nov 2018
Held atPhysics of X-Ray and Neutron Multilayer Structures, PXRNMS2018
Event typeWorkshop
LocationParis, France
Degree of RecognitionInternational