Piezoelectrically driven silicon beam force sensor

C.J. van Mullem (Speaker), F.R. Blom (Speaker), J.H.J. Fluitman (Speaker), Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Period1 Oct 1990
    Event title4th European Conference on Solid-State Transducers, Eurosensors 1990
    Event typeConference
    Conference number4
    LocationKarlsruhe, Germany