Piezoelectrically driven silicon beam force sensor

  • C.J. van Mullem (Speaker)
  • F.R. Blom (Speaker)
  • J.H.J. Fluitman (Speaker)
  • Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentation › Oral presentation

    Period1 Oct 1990
    Event title4th European Conference on Solid-State Transducers, Eurosensors 1990
    Event typeConference
    Conference number4
    LocationKarlsruhe, GermanyShow on map