Plasma-Assisted Nanolithograpy with Organometallic Homo- and Block Coploymers

Vancso, G. J. (Speaker), S. Golze (Speaker), Hempenius, M. A. (Speaker), H. Hillborg (Speaker), I. Korczagin (Speaker), Lammertink, R. G. H. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: New York
Period7 Sep 2003
Held at226th ACS National Meeting
Event typeConference
Conference number226
LocationNew York City, United States, New York

Keywords

  • METIS-215485