Plasma-Assisted Nanolithograpy with Organometallic Homo- and Block Coploymers

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: New York
Period7 Sep 2003
Event title226th ACS National Meeting: Fall 2003
Event typeConference
Conference number226
OrganiserAmerican Chemical Society
LocationNew York City, United States, New York

Keywords

  • METIS-215485