Plasma etching in microtechnology

H.V. Jansen (Keynote speaker), M.J. de Boer (Keynote speaker), Gardeniers, J. G. E. (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Period3 Dec 1996
    Event titleMRS Fall Meeting 1994
    Event typeConference
    LocationBoston, United States, Massachusetts
    Degree of RecognitionInternational

    Keywords

    • METIS-116433