Poly(ferrocenylsilanes) as Etch Barriers in Nano and Microlithographic Applications

Hempenius, M. A. (Speaker), Lammertink, R. G. H. (Speaker), M. Péter (Speaker), S. Kooij (Speaker), Vancso, G. J. (Speaker)

Activity: Talk or presentationOral presentation


Plaats van uitgifte: Ottawa, Canada
Period11 Aug 2003
Event title39th IUPAC Congress and 86th Conference of the Canadian Society for Chemistry 2003
Event typeConference
LocationOttawa, Canada, Ontario


  • METIS-213287