Poly(ferrocenylsilanes) as Etch Barriers in Nano and Microlithographic Applications

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Ottawa, Canada
Period11 Aug 2003
Event title39th IUPAC Congress and 86th Conference of the Canadian Society for Chemistry 2003
Event typeConference
LocationOttawa, Canada, OntarioShow on map

Keywords

  • METIS-213287