Polymer bonding of micro-machined silicon structures

C. den Besten (Speaker), R.E.G. van Hal (Speaker), J. Munoz (Speaker), Piet Bergveld (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Universiteit Twente, Enschede
    Period26 Jun 1992
    Event titleMESA Dag 1992: null
    Event typeConference
    LocationEnschede, Netherlands

    Keywords

    • METIS-118136