Rapid thermal oxidation for passivation of porous silicon

I. Barsony (Keynote speaker), J.G.E. Klappe (Keynote speaker), E. Vazsonyi (Keynote speaker), T. Lohner (Keynote speaker), M. Fried (Keynote speaker)

Activity: Talk or presentationOral presentation

Description

Opmerking: Key-note speaker Plaats van uitgifte: San Francisco, CA, USA
Period4 Apr 1994
Event titleMRS Spring Meeting 1994, Technical Symposium G-Rapid Thermal and Integrated Processing III: null
Event typeConference
LocationSan Fransisco, United States, California

Keywords

  • METIS-116291