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Reaching record reflectivity for EUV optics
Ackermann, M. D.
(Speaker)
XUV Optics
MESA+ Institute
Activity
:
Talk or presentation
›
Invited talk
Period
19 Sept 2024
Event title
UT alumni @ASML Event 2024
Event type
Other
Location
Veldhoven, Netherlands
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Degree of Recognition
National
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