RIE-lag in high aspect ratio trench etching of silicon

Henricus V. Jansen (Keynote speaker)

    Activity: Talk or presentationInvited talk

    Period22 Sep 1996
    Event title22nd International Conference on Micro- and Nano-Engineering, MNE 1996<br/>
    Event typeConference
    Conference number22
    LocationGlasgow, United Kingdom