RIE-lag in high aspect ratio trench etching of silicon

  • Henricus V. Jansen (Keynote speaker)

    Activity: Talk or presentation › Invited talk

    Period22 Sept 1996
    Event title22nd International Conference on Micro- and Nano-Engineering, MNE 1996
    Event typeConference
    Conference number22
    LocationGlasgow, United KingdomShow on map