Sacrificial wafer bonding: an addition to the micromachining techniques

V.L. Spiering (Keynote speaker), Berenschot, J. W. (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)

    Activity: Talk or presentationOral presentation


    Opmerking: Key-note speaker
    Period24 May 1995
    Event title187th Meeting of The Electrochemical Society 1995
    Event typeConference
    LocationReno, United States, Nevada
    Degree of RecognitionInternational


    • METIS-116209