Selective Chemical Vapor Deposition

J. Holleman (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Lithuania
    Period3 Sep 2001
    Held atNATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies 2001
    Event typeConference
    LocationKaunas, Lithuania
    Degree of RecognitionInternational

    Keywords

    • METIS-200816